サカキ マモル榊 守教授Mamoru SAKAKI
■研究者基本情報
■研究活動情報
論文
- Development of a New Method for Assembling a Bipolar DC Motor as a Teaching Material
Yuki Matsumoto; Kei Sakaki; Mamoru Sakaki, AMER ASSN PHYSICS TEACHERS
PHYSICS TEACHER, 2017年05月, ［査読有り］ - 〔主要な業績〕発達障害者支援のためのiOS端末外付けスイッチデバイスの開発
平沼清一; 櫻井幸子; 廣木 聡; 宮山敬子; 丹下 裕; 中川重康; 榊 守
茨城大学教育実践研究, 2016年12月 - "Computer hard disk drive transforms into the bone conduction speakers”
S. Hiranuma; A. Sasaki; M. Sakaki
Proc. of 13th international conference on Hands-on Science, HSCI 2016, 2016年07月18日, ［査読有り］ - Redundant computer hard disk transforms into induction motor
Mamoru Sakaki; Atsushi Sasaki
Physics Education, 2005年01月, ［査読有り］ - Magnetic-pendulum set-up illustrates eddy-current generation and inhibition
Mamoru Sakaki; Yusaku Seki; Atsushi Sasaki, Institute of Physics Publishing
Physics Education, 2005年, ［査読有り］ - Computer hard drive transforms into the most basic of speakers
Mamoru Sakaki; Yoshinori Moriwaki; Hiroshi Anzou
Phys. Educ., 2004年, ［査読有り］ - Differentially evacuated ion energy analyzer for cathodic arc plasma
M Sakaki; T Sakakibara, A new type of retarding grid ion energy analyzer with a differential evacuation unit has been developed for the measurement of the ion energy distribution of a medium vacuum are. The ion energy distribution in a cathodic are plasma of 5 Pa pressure was measured. The experimental results indicate that the ion energy distribution measured with differential evacuation is more accurate than that measured without differential evacuation. (C) 1996 American Institute of Physics., AMER INST PHYSICS
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996年06月, ［査読有り］ - CHARACTERIZATION OF ION BEHAVIOR IN TI CATHODE N-2 VACUUM-ARC USING PLANE PROBE DIAGNOSTICS AND SPECTROSCOPIC MEASUREMENTS
M SAKAI; T SAKAKIBARA, This study characterizes ion behavior of cathodic arc plasmas which have been used for the TiN coating. The ion currents are measured using a plane probe. The probe plane is vertical and parallel to the are axis. Spectral intensities of Ti+ and Ti++ ions are also measured as a function of pressure (0.01-30 Pa). As a result of these measurements, it was found that at pressures below 0.1 Pa, the predominant ions in the plasma are Ti++ which have a tendency to be directional or to have a beam component, whereas at pressures above 0.1 Pa, mainly Ti+ ions of random motion are present. (C) 1995 American Institute of Physics., AMER INST PHYSICS
APPLIED PHYSICS LETTERS, 1995年10月, ［査読有り］ - Influence of titanium ion energy on the composition of TiN films obtained by reactive arc evaporation
Mamoru Sakaki
Proc. 11th International Conference on Gas Discharge and Their Applications, 1995年, ［査読有り］ - EXCITATION, IONIZATION, AND REACTION-MECHANISM OF A REACTIVE CATHODIC ARE DEPOSITION OF TIN
M SAKAKI; T SAKAKIBARA, This paper discusses the excitation, ionization and reaction mechanism of reactive cathodic are deposition of TiN. Such are plasmas are operated in the are discharge type PVD apparatus. The 50 A are is operated in N-2 atmosphere of 0.13 to 26.6 Pa, The are voltage, the electron energy distribution and the spectral intensities are measured as a function of pressure, The deposited films are analyzed by XPS.
It follows from the result that (1) the N-2 molecules impact with the high energy electron to be excited or ionized; (2) Ti++ ions which are initially emitted from the cathode spot recombine with electrons and turn Ti+ ions and Ti atoms and the recombination ratio increases with increasing pressure; (3) the TiN compound is produced on the substrate surface in the ensuing process, the excited N-2 are adsorbed on the substrate surface, the N-2 are dissociated to N atoms through collisions with Ti+ ions of 40-60 eV, the N atoms react with the Ti atoms to form TiN., IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1994年12月, ［査読有り］ - 真空アークプロセスにおけるイオンの特性と表面反応メカニズム
榊原建樹; 榊 守
放電研究 (ISSN 0911-8713), 1994年11月02日, ［査読有り］, ［招待有り］ - PRESSURE-DEPENDENCE OF PLASMA PARAMETERS IN MEDIUM-VACUUM NITROGEN ARC-DISCHARGE WITH THE TITANIUM CATHODE
M SAKAKI; T SAKAKIBARA, This paper is concerned with plasma properties of a medium-vacuum nitrogen arc discharge with the titanium cathode. The arc chamber used is 400 mm in diameter and 600 mm in length. The cathode diameter and thickness are 64 and 25 mm, respectively. The experimental conditions are as follows: Pressure range = 1 x 10(-3) approximately 2 x 10(-1) torr; N2 gas flow rate = 6 ml/min; arc current = 50 A.
Electric probe characteristics are measured as a function of pressure and distance from the cathode surface. The analytical results obtained from these measurements show that the electron energy distribution takes 1-Mx at pressures above 1 x 10(-2) torr, whereas 2-Mx at pressure under 4 x 10(-2) torr and the electron density have a maximum value at a certain pressure.
Furthermore, Ti+, Ti++, and N2+ ion spectral intensities are measured as a function of pressure and distance from the cathode surface. On comparison of those results and the electron density, the pressure dependence of the Ti+ spectral intensity turns out to that of the electron density. This suggests that the major ion in the plasma volume is Ti+ species., IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991年02月, ［査読有り］
講演・口頭発表等
